WF6 waxaa inta badan loo isticmaalaa sida walxo ceeriin ah oo loogu talagalay kaydinta uumiga kiimikada (CVD) ee tungsten birta ah ee warshadaha elektiroonigga ah. WSI2 oo laga sameeyay WF6 waxaa loo isticmaali karaa sidii qalab xadhig ah oo ku jira wareegyada waaweyn ee isku dhafan (LSI), waxaana sidoo kale loo isticmaali karaa sida alaabta ceeriin ee korantada semiconductor, fluorine Walxaha ceeriin ee wakiilada kiimikada, kicinta polymerization, alaabta indhaha, iwm.